Mehregany, M: search on Z-Library

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1

Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

Chien-Hung Wu,, Zorman, C.A., Mehregany, M.

Journal:

IEEE Sensors Journal

Year:

2006

Language:

english

File:

PDF, 978 KB

english, 2006

2

Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon

Uenishi, Y, Tsugai, M, Mehregany, M

Journal:

Journal of Micromechanics and Microengineering

Year:

1995

Language:

english

File:

PDF, 754 KB

english, 1995

3

Nanoelectromechanical systems: Nanodevice motion at microwave frequencies

Henry Huang, Xue Ming, Zorman, Christian A., Mehregany, Mehran, Roukes, Michael L.

Journal:

Year:

2003

Language:

english

File:

PDF, 284 KB

english, 2003

4

Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication

Pan, Tao, Hyman, Daniel, Mehregany, Mehran, Reshotko, Eli, Garverick, Steven

Journal:

Year:

1999

Language:

english

File:

PDF, 626 KB

english, 1999

5

Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration

Hyman, Dan, Pan, Tao, Reshotko, Eli, Mehregany, Mehran

Journal:

Year:

1999

Language:

english

File:

PDF, 633 KB

english, 1999

6

Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines

Rajan, N., Mehregany, M., Zorman, C.A., Stefanescu, S., Kicher, T.P.

Journal:

Journal of Microelectromechanical Systems

Year:

1999

Language:

english

File:

PDF, 1.18 MB

english, 1999

7

Micro gears and turbines etched from silicon

Mehregany, K.J. Gabriel, W.S.N. Trimmer

Journal:

Sensors and Actuators

Year:

1987

Language:

english

File:

PDF, 590 KB

english, 1987

8

A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

Robert G. Azevedo, Debbie G. Jones, Anand V. Jog, Babak Jamshidi, David R. Myers, Li Chen, Xiao-an Fu, Mehran Mehregany, Muthu B. J. Wijesundara, Albert P. Pisano

Journal:

IEEE Sensors Journal

Year:

2007

Language:

english

File:

PDF, 2.21 MB

english, 2007

9

Silicon carbide MEMS for harsh environments

Mehregany, M., Zorman, C.A., Rajan, N., Chien Hung Wu

Journal:

Proceedings of the IEEE

Year:

1998

Language:

english

File:

PDF, 399 KB

english, 1998

10

In Situ Measurement of Young’s Modulus and Residual Stress of Thin Electroless Nickel Films for Mems Applications

Roy, S., Furukawa, S., Miyajima, H., Mehregany, M.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 1.72 MB

english, 1994

11

Microfabricated electrohydrodynamic pumps

Stephen F. Bart, Lee S. Tavrow, Mehran Mehregany, Jefrey H. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 664 KB

english, 1990

12

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Stainless steel capacitive pressure sensor for high pressure and corrosive media applications

Ho, Shih-Shian, Rajgopal, Srihari, Mehregany, Mehran

Year:

2010

Language:

english

File:

PDF, 624 KB

english, 2010

13

Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication

Wiser, R.F., Juyong Chung,, Mehregany, M., Zorman, C.A.

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 4.22 MB

english, 2005

14

[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches

He, Tina, Yang, Rui, Rajgopal, Srihari, Bhunia, Swarup, Mehregany, Mehran, Feng, Philip X.-L.

Year:

2013

Language:

english

File:

PDF, 1.17 MB

english, 2013

15

[IEEE 2011 5th International Symposium on Medical Information and Communication Technology (ISMICT) - Montreux, Switzerland (2011.03.27-2011.03.30)] 2011 5th International Symposium on Medical Information and Communication Technology - A mobile wearable wireless fetal heart monitoring system

Roham, Masoud, Saldivar, Enrique, Raghavan, Srinivas, Zurcher, Mark, Mack, Jonathan, Mehregany, Mehran

Year:

2011

Language:

english

File:

PDF, 633 KB

english, 2011

16

A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement

Li Chen, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.05 MB

english, 2008

17

Outer-rotor polysilicon wobble micromotors

Keren Deng, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 618 KB

english, 1998

18

Application of electric microactuators to silicon meromechanics

R. Mahadevan, M. Mehregany, K.J. Gabriel

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 1.14 MB

english, 1990

19

Contact physics of gold microcontacts for MEMS switches

Hyman, D., Mehregany, M.

Journal:

IEEE Transactions on Components and Packaging Technologies

Year:

1999

Language:

english

File:

PDF, 701 KB

english, 1999

20

[IEEE 2009 IEEE Custom Integrated Circuits Conference (CICC) - San Jose, CA, USA (2009.09.13-2009.09.16)] 2009 IEEE Custom Integrated Circuits Conference - Fully-monolithic, 600°C differential amplifiers in 6H-SiC JFET IC technology

Patil, Amita C., Fu, Xiao-an, Mehregany, Mehran, Garverick, Steven L.

Year:

2009

Language:

english

File:

PDF, 933 KB

english, 2009

21

Smart ice detection systems based on resonant piezoelectric transducers

Shuvo Roy, Alain Izad, Russell G. DeAnna, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 663 KB

english, 1998

22

Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks

Myers, David R., Azevedo, Robert G., Chen, Li, Mehregany, Mehran, Pisano, Albert P.

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 872 KB

english, 2012

23

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Advances in silicon carbide micro- and nano-electro-mechanical systems fabrication technology and applications

Mehregany, Mehran

Year:

2013

Language:

english

File:

PDF, 3.10 MB

english, 2013

24

A simple fabrication process for polysilicon side-drive micromotors

Deng, K., Mehregany, M., Dewa, A.S.

Journal:

Journal of Microelectromechanical Systems

Year:

1994

Language:

english

File:

PDF, 1.31 MB

english, 1994

25

SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Integrated Optics and Microstructures II - Fabrication of polygon mirror microscanner by surface micromachining

Miyajima, H., Deng, K., Mehregany, Mehran, Merat, Francis L., Furukawa, Shoichi, Tabib-Azar, Massood, Polla, Dennis L., Wong, Ka-Kha

Year:

1994

Language:

english

File:

PDF, 637 KB

english, 1994

26

Anisotropic etching of silicon in hydrazine

Mehran Mehregany, Stephen D. Senturia

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 2.56 MB

english, 1988

27

Media compatible stainless steel capacitive pressure sensors

Shih-Shian Ho, Srihari Rajgopal, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 2.08 MB

english, 2013

28

Characterization of frequency tuning using focused ion beam platinum deposition

Enderling, Stefan, Hedley, John, Jiang, Liudi, Cheung, Rebecca, Zorman, Christian, Mehregany, Mehran, Walton, Anthony J

Journal:

Journal of Micromechanics and Microengineering

Year:

2007

Language:

english

File:

PDF, 373 KB

english, 2007

29

Innovation for Engineers || The Innovative Mind

Mehregany, Mehran

Year:

2018

Language:

english

File:

PDF, 308 KB

english, 2018

30

Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications

Xiao-An Fu, Jeremy L. Dunning, Christian A. Zorman, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 435 KB

english, 2005

31

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A Zorman

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 2.10 MB

english, 1999

32

Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films

Hatty, V., Kahn, H., Trevino, J., Zorman, C. A., Mehregany, M., Ballarini, R., Heuer, A. H.

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 711 KB

english, 2006

33

Surface-micromachined RF MEMs switches on GaAs substrates

Daniel Hyman, Juan Lam, Brett Warneke, Adele Schmitz, T. Y. Hsu, Julia Brown, James Schaffner, Andy Walston, Robert Y. Loo, Mehran Mehregany, Jae Lee

Journal:

International Journal of RF and Microwave Computer-Aided Engineering

Year:

1999

Language:

english

File:

PDF, 505 KB

english, 1999

34

SiC cantilever resonators with electrothermal actuation

Liudi Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S. Burdess, M. Mehregany, C.A. Zorman

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 587 KB

english, 2006

35

Electroless plating of nickel on silicon for fabrication of high-aspect-ratio microstructures

Shoichi Furukawa, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 672 KB

english, 1996

36

Monocrystalline silicon carbide nanoelectromechanical systems

Yang, Y. T., Ekinci, K. L., Huang, X. M. H., Schiavone, L. M., Roukes, M. L., Zorman, C. A., Mehregany, M.

Journal:

Applied Physics Letters

Year:

2001

Language:

english

File:

PDF, 367 KB

english, 2001

37

Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extraction

Wiser, R.F., Tabib-Azar, M., Mehregany, M., Zorman, C.A.

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 1.80 MB

english, 2005

38

Surface micromachined mechanisms and micromotors

Mehregany, M, Tai, Yu-Chong

Journal:

Journal of Micromechanics and Microengineering

Year:

1991

Language:

english

File:

PDF, 1.53 MB

english, 1991

39

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions

He, Tina, Yang, Rui, Rajgopal, Srihari, Tupta, Mary Anne, Bhunia, Swarup, Mehregany, Mehran, Feng, Philip X.-L.

Year:

2013

Language:

english

File:

PDF, 4.03 MB

english, 2013

40

High-aspect-ratio photolithography for MEMS applications

Miyajima, H., Mehregany, M.

Journal:

Journal of Microelectromechanical Systems

Year:

1995

Language:

english

File:

PDF, 2.36 MB

english, 1995

41

Measurement of Residual Stress-Induced Bending Moment of P+ Silicon Films

Chu, W. H., Mehregany, M., Ning, X., Pirouz, P.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 913 KB

english, 1991

42

Theoretical modeling of microfabricated beams with elastically restrained supports

. Qingyuan Meng, M. Mehregany, R. Mullen

Journal:

Journal of Microelectromechanical Systems

Year:

1993

Language:

english

File:

PDF, 770 KB

english, 1993

43

[IEEE ICIASF '95 Record. International Congress on Instrumentation in Aerospace Simulation Facilities - Wright-Patterson AFB, OH, USA (18-21 July 1995)] ICIASF '95 Record. International Congress on Instrumentation in Aerospace Simulation Facilities - Characterization of microfabricated shear stress sensors

Tao Pan,, Hyman, D., Mehregany, M., Reshotko, E., Willis, B.

Year:

1995

Language:

english

File:

PDF, 895 KB

english, 1995

44

Effect of rotor slip on the gear ratio of harmonic side-drive micromotors

Stephen M. Phillips, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 777 KB

english, 1993

45

A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD

Sangsoo Noh, Xiaoan Fu, Li Chen, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 506 KB

english, 2007

46

Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process

S. Roy, S. Furukawa, M. Mehregany

Journal:

Microsystem Technologies

Year:

1996

Language:

english

File:

PDF, 1.36 MB

english, 1996

47

Determination of Young’s modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process

S. Roy, S. Furukawa, M. Mehregany

Journal:

Microsystem Technologies

Year:

1995

Language:

english

File:

PDF, 1.15 MB

english, 1995

48

Thin-film processing of TiNi shape memory alloy

J.A. Walker, K.J. Gabriel, M. Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 711 KB

english, 1990

49

Deposition of Polycrystalline 3C-SiC Films on 100 mm Diameter Si(100) Wafers in a Large-Volume LPCVD Furnace

Zorman, C. A., Rajgopal, S., Fu, X. A., Jezeski, R., Melzak, J., Mehregany, M.

Journal:

Electrochemical and Solid-State Letters

Year:

2002

Language:

english

File:

PDF, 185 KB

english, 2002

50

Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO/sub 2/ and polysilicon

Azzam Yasseen, A., Zorman, C.A., Mehregany, M.

Journal:

Journal of Microelectromechanical Systems

Year:

1999

Language:

english

File:

PDF, 399 KB

english, 1999

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